采用激光脈沖分子束外延技術，在(100)取向SrTiO3或Nb:SrTiO3單晶基片上成功外延生長不同結構的LaAlO3/BaTiO3超晶格。利用高能電子衍射技術和X射線衍射技術對LaAlO3/BaTiO3超晶格的生長過程和微結構進行了表征。發(fā)現由于LaAlO3和BaTiO3晶格常數的不匹配，在LaAlO3/BaTiO3超晶格中存在應變，該應變又對超晶格的鐵電性能具有很大的影響。而不同的結構存在的應變不同，非對稱結構的LaAlO3/BaTiO3超晶格的應變隨每個周期中LaAlO3層厚度的增加、BaTiO3層厚度的減少而增大，其剩余極化強度不僅未減少，反而增加。

LaAlO3/BaTiO3 superlattices were prepared on (100) oriented SrTiO3 or Nb-doped SrTiO3 substrates by laser molecular beam epitaxy. The change of diffraction streaks observed in reflection high-energy electron diffraction during the growth of LaAlO3 and BaTiO3 illustrated the different epitaxial growth for LaAlO3 and BaTiO3 . The X-ray diffraction spectra of the superlattices with different thickness of LaAlO3 and BaTiO3 layers within a period showed that the c-axis lattice constants changed with layer thickness due to the strain induced by lattice mismatch between LaAlO3 and BaTiO3. The remanent polarization of the superlattices increased with decreasing the thickness of BaTiO3 layers and increasing the thickness of LaTiO3 layers. This suggests that the remanent polarization is closely related with the lattice strain in the superlattices.