闡述了一種氟離子敏場效應(yīng)晶體管(FISFET) 型傳感器的結(jié)構(gòu)和工作原理。它是在pH2ISFET傳感器的基礎(chǔ)上用PVC 方法把離子敏場效應(yīng)晶體管和氟化物敏感膜相結(jié)合,制成氟離子敏場效應(yīng)晶體管。該傳感器具有全固態(tài)化‰體積小的特點(diǎn)。實(shí)驗(yàn)表明該傳感器的靈敏度為50mV/ C , 響應(yīng)時間:小于1min ,相關(guān)系數(shù)為0. 984 2 ,對氟化物的檢測范圍:1 ×10 - 6～1 ×10 - 1 mol/ L。
關(guān)鍵詞: 離子敏場效應(yīng)晶體管; 氟; 敏感材料
Abstract : The structure and basic working principle of a type of fluoride ion sensitive field effect transistor(FISFET) are presented. It is the base of hydrogen ion sensitive field effect transistor ,used fluoride sensitive membrane as ISFET gate. FISFET has a lot of advantages ,such as minimal size ,solid structure. some experiments have been done with the FISFET, The results show that the characteristics of the FISFET sensor are sensitivity :50 mV/ C ,resporse time :1min ,correlation coefficient :0. 984 2 ,measurement range :10- 6～10 - 1 mol/ L.
Key words : ion sensitive field effect transistor( ISFET) ; fluoride ; sensitive material